The Zenith integrated vacuum and abatement systems from Edwards offer a range of turn-key, process-centric exhaust management solutions for semiconductor manufacturing. All components are completely integrated and each function is supported by a powerful control interface.
The iXH series of dry pumps for harsh processes feature a wide temperature range, which helps minimize by-product accumulation. The Gas Buster and pump seal technology helps lengthen process life and reduce leakage risks.
The Atlas combustion-based abatement family offers a range of abatement systems tailored to the needs of individual semiconductor manufacturing processes, such as CVD and etch. A combination of combustion abatement and wet scrubbing stages provide excellent powder handling and resistance to corrosion.
Mike Allison, managing director, sales and service, Edwards said: “Advanced semiconductor manufacturing processes have created new vacuum technology challenges, while environmental concerns are leading to tighter regulation of the gases exhausted during the semiconductor manufacturing process. At the same time, economic imperatives are driving semiconductor manufacturers to seek opportunities to lower the CoO of their tools, as well as reduce overall manufacturing costs. Both the Atlas abatement system and the iXH pump were designed to meet these latest manufacturing requirements, while delivering lower system CoO, reduced utility costs, improved ease-of-use and extend maintenance cycles. Combining the two in a Zenith system, results in additional CoO benefits from increased system integration, while also reducing installation time and complexity, and saving valuable fab real estate.”
