The new TMP-X series will contribute to reducing the costs and downsizing the footprint of manufacturing flat panel displays and semiconductor devices.
On 2 September 2013, Shimadzu Corporation will launch the company’s new 'TMP-X2905/X3405' series of turbo molecular pumps with integrated power supplies and 3000 L/s class pumping speeds for semiconductor and flat panel display manufactures.
Turbo molecular pumps (TMP) produce a vacuum due to the high speed rotation of turbines that enables vacuum pumping at the molecular flow level. TMP are essential components for the manufacture of semiconductors and flat panel displays where oil free, clean, high vacuums are essential.
Redesign of conventional integrated power supply TMP enabled a 15% reduction in the height of the new pump whilst maintaining the pumping performance. Also, the TMP-X pumps are almost the same size as the main body of conventional TMP with separate power supply cables that are used for hard processing.
The incorporation of a pump temperature control function and improvement of the motor power output has enabled the use of the TMP-X series of pumps for manufacturing processes involving high gas flow rates and reactive gases.
