The Finnish company has used its Atomic Layer Deposition (ALD) coating technology to reduce mechanical wear and corrosion of moving parts, so cutting downtime and potential production losses.

"Protecting pumps and compressors against wear and corrosion by ALD is a new area for us. In our key market segments, IC- and other semiconductor industries, most of the manufacturing steps happen under vacuum and involve the use of potentially corroding chemicals and gases which drift to the abatement system after the actual process,” said chief operating officer Timo Malinen.

“Eliminating the detrimental effect of these substances on the abatement system parts not only increases the total yield of the factory but also saves costs with a reduced number of service breaks.”