Dryvac systems for thin film coating processes

DRYVAC Systems, copyright Oerlikon Leybold Vacuum
DRYVAC Systems, copyright Oerlikon Leybold Vacuum

Oerlikon Leybold Vacuum develops complete vacuum solutions for all coating applications. The compact and smart vacuum solutions consist of high vacuum, booster / dry pump combinations, as well as control devices, if required.

Standardized systems based on DRYVAC dry screw pumps in combination with roots blowers from the RUVAC WH family are the optimal solution for flat panel display application like fast load lock, transfer and deposition processes. The company claims the systems offer the fastest pump down times with the highest pumping speeds in their class. The major customer benefits are standardized interfaces such as electrical connections, purge options and/or cooling water, paired with easy maintenance access and a very convenient backup pool handling.

Major processes in which it is claimed these systems excel:

  • Load lock / transfer
  • Transistor sputter TSPT / Color filter sputter FSPT / Cell
  • OLED encapsulation / Evaporation
  • Transistor TFT-PECVD / Thin film encapsulation TFE-PECVD
  • VCD Photoresist coater