The COOLVAC 60.000 series pumps, with a flange diameter of 1.3 m and a pumping rate of 60 000 litres per second for nitrogen, are currently being manufactured at Oerlikon Leybold Vacuum’s Dresden facility.
Cryo pumps are used wherever very large vacuum chambers need to be evacuated very rapidly to extremely low pressures, offering high pumping rates and an attainable vacuum of 10–12 mbar. A major field of application is the aerospace industry, where rocket elements, satellites, space shuttles or space station parts need to be examined in giant simulation chambers.
