The Turbovac Magintegra magnetically levitated turbo molecular pumps can run without the space usually needed for a separate frequency converter and provide a compact, flexible design, improved vacuum performance, the company says. They are suitable for industrial processes, such as display, solar, coating, and R&D applications. The pumps are resistant against process particles and deposits and tolerate process induced shock venting to a high degree as well as assembly in any position and angle. The housing is combined with a frequency converter which can be mounted flexibly as well.
Oerlikon Leybold Vacuum's Turbovac Magintegra range features a 5-axis magnetically levitated bearings, improving their resistance against hydrocarbons, especially when even low contamination of remaining bearing lubricants or greases are not compatible with sensitive manufacturing processes. They can operate at extremely low vibration levels and feature communication interfaces and an intelligent monitoring of pump parameters, including self-protection functions in case of operational disturbances.
The Dryvac range combines the screw technology pumping principle with a compact design. In the standard vertical combination with a RUVAC Roots pump, the footprint at the production line is minimized. In addition, the pump combination can be executed horizontally.
