Edwards Limited, the manufacturer of vacuum products and abatement systems, has introduced its STP-iXA4506 large-capacity turbomolecular pump (TMP), designed to deliver significant savings for cost-sensitive manufacturers of semiconductors, flat panel displays, LEDs and solar panels.
“The new STP-iXA4506 turbo pump is the all-in-one solution with improved pumping performance,” said Shinichi Yoshino, TMP product marketing manager, Edwards.
“It pairs Edwards’ latest rotor design with the well-established, highly reliable, on-board controller of the iXA series, to maximise the allowable gas throughput and hence minimise the number of pumps required for high flow processes, particularly in solar and flat panel applications. The fully integrated controller eliminates the need and cost of cables and a separate controller rack, resulting in a compact package that is fast and easy to install in a variety of applications. And, like all of our magnetically levitated turbo pumps, the absence of mechanical bearings practically eliminates the cost of periodic maintenance.”
The pump’s high speed (4300 l/s N2) and throughput (up to 4300 sccm N2), combined with its ability to efficiently pump both light and heavy gases, make the STP-iXA4506 ideal for a wide range of large-volume, high-flow applications, including semiconductor etch, LCD etch, glass coating, solar PVD and coating PVD. Its tightly-integrated design includes a completely sealed electronic module for robust, reliable operation in the most demanding factory environments.
When needed, a thermal management system can be added to reduce the accumulation of deposits and particulates from process byproducts.
