The Fossa is a hermetic sealed, completely dry-compressing vacuum pump which is suitable for a wide range of specialist applications. These include the handling of noble gases, helium leak detectors, laboratories and R & D, analytical devices, mass spectrometers and electron microscopes, to name but a few. A key sector for Fossa is in the semiconductor industry, where it is used for the evacuation of load locks and transfer chambers. Other general industrial applications include the handling and transport of inert gases, plasma cleaning machines and coating machines. When used in conjunction with a turbomolecular vacuum pump, the Fossa provides a completely dry vacuum for use in high vacuum applications.
Mark Sumnall, UK sales director for Busch (UK) Limited, said: “From a technical perspective, the new Fossa has been designed and constructed to ensure that no lubricated mechanical parts are located within the compression chamber. Thanks to its hermetically sealed design, contamination or chemical reactions with pump operating fluids are eliminated and there’s also an optional gas-ballast valve which allows for the improved pumping of vapours. An additional benefit is the spiral tip seal can be replaced by the operator in just a few minutes, without the need for special tools.”