The 12 000 m2 Kumamoto plant features highly flexible production facilities capable of making chemical mechanical polishing (CMP) systems, a major product line for Ebara, as well as other products including semiconductor manufacturing equipment.
The new plant, which is expected to double Ebara’s production capacity for precision products in Kumamoto, began operating in November 2016 and will start running at full production capacity at the beginning of next year.
Kumamoto’s maintenance service facility will serve as a hub for maintenance services for dry vacuum pumps, mainly covering the Kyushu and Chugoku areas.
