Ebara Corp has built a ¥1 billion Components Development and Innovation Centre in Fujisawa, Japan for dry vacuum pumps and gas abatement systems.
The new Components Development and Innovation lab will play an integral role in the advanced development and testing of next generation dry vacuum pumps and gas abatement systems, which are core products of Ebara’s Precision Machinery Business. The 2245 m2 two-storey facility is scheduled to start full operation from 1 October 2019.
The V6 Building’s floor area and number of test benches are more than double Ebara’s existing facilities. Process gas introduction and treatment equipment reproduce the operating environment for customers, while a demonstration room enables customers to witness the operation of new products.
The new facility provides custom configuration for integrated testing and operation of both dry vacuum pumps and gas abatement systems in one location. The test data measurement system uses Internet of Things (IoT) technology. The facility also has a meeting space where employees and customers can collaborate on new ideas and technologies.
Ebara says that with the growth in IoT and artificial intelligence (AI), semiconductors are being used for a wider range of applications. As a result, demand for advanced semiconductor manufacturing equipment, including next generation dry vacuum pumps and gas abatement systems, is also on the increase.