The model EV-L is a dry vacuum pump designed for medium-duty applications such as metal and poly etching. The model EV-L is an addition to the current model EV-S designed for light-duty applications (load lock room, test rigs, PVD equipment, etc.) and the model EV-M, designed for harsh-duty applications, such as thin film deposition systems. The new model completes Ebara’s line-up of optimal performance dry vacuum pumps offered for sale across the range, from light-duty to harsh-duty.
The model EV-L is a compact, low power consumption model with corrosion resistant materials employed as standard, and with the optimal temperature profile appropriate for the process application.